Plasma assisted diffusion heat treatment has been wellknown for interstitial diffusion processes such as carburizing, nitriding etc. However, such glow discharge plasma assisted diffusion treatment has been scarcely reported for substitutional processes like aluminizing. This work presents an overview of the plasma based aluminide diffusion treatment on 9Cr steels and Ti substrates. This paper will elaborate on the changes in microstructure and mechanical properties of plasma processed iron aluminide and titanium aluminide coated substrates. The processed samples have been characterized using SEM-EDS, X-ray diffraction, vicker's microhardness and tensile test data. The plasma has been found to promote stable alpha-alumina phase after heat treatment and is also found to create nanocrystalline aluminide structure in the diffusion coating as found from XRD data. This is also supported by vicker's hardness measurements. The tensile tests showed marginal change in the tensile strength of substrates as compared to uncoated samples. The high temperature oxidation resistance of the plasma substrates was significantly better than the conventionally treated samples.
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